[identification and measurement of concentration of elements based on the fact that primary-emission x-rays emitted by an element excited by an electron beam have a wavelength characteristic of that element and an intensity related to its concentration; may be performed by an electron probe microanalyzer, an electron microscope microanalyzer, or by an electron microscope, or scanning electron microscope, fitted with an x-ray spectrometer. ( CSP )]
UMLS (CSP) C0013844 Relation/PAR: spectrometry